|
产品规格 |
99.995% |
99.999% |
||||
|
氧气(O2)+ 氮气(N2) |
≤10ppm |
≤2ppm |
||||
|
四氟化碳(CF4) |
≤1ppm |
≤0.5ppm |
||||
|
六氟乙烷(C2F6) |
≤1ppm |
/ |
||||
|
八氟丙烷(C3F8) |
≤1ppm |
≤1ppm |
||||
|
SO2F+SOF2+S2F10O |
≤1ppm |
≤1ppm |
||||
|
甲烷 (CH4)
|
/ |
≤1ppm |
||||
|
一氧化碳(CO) |
/ |
≤1ppm |
||||
|
二氧化碳(CO2) |
/ |
≤1ppm |
||||
|
水(H2O) |
≤2ppm |
≤1ppm |
||||
|
露点（℃） |
≤-62℃ |
≤-69℃ |
||||
|
酸度(As HF) |
≤0.2ppm |
≤0.1ppm |
||||
|
可水解氟化物(As HF) |
≤1ppm |
≤0.8ppm |
||||
|
矿物油 |
≤1ppm |
N/D |
||||